Fabrication of the Crystalline ITO Pattern by Picosecond Laser with a Diffractive Optical Element
نویسندگان
چکیده
منابع مشابه
Fabrication of the Crystalline ITO Pattern by Picosecond Laser with a Diffractive Optical Element
This study presents the fabrication of crystalline indium tin oxide (c-ITO) patterns on glass substrate using laser-induced crystallization followed by chemical etching. In the proposed approach, an amorphous ITO (a-ITO) thin film was transformed into a c-ITO structure over a predetermined area using infrared picosecond fiber laser irradiation with a 500 kHz repetition rate, under a single lase...
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ژورنال
عنوان ژورنال: Journal of Laser Micro/Nanoengineering
سال: 2013
ISSN: 1880-0688
DOI: 10.2961/jlmn.2013.02.0009